Beilstein J. Nanotechnol.2022,13, 1240–1255, doi:10.3762/bjnano.13.103
growth could be achieved.
Keywords: densityfunctionaltheory (DFT) studies; double reactions; surface chemistry; titanicone; Introduction
Molecular layer deposition (MLD), a thin film deposition technique, has attracted significant attention in recent years as a suitable approach for the deposition of
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Figure 1:
The plotted ligand loss reactions of TiCl4 on the anatase/rutile TiO2 surfaces. Optimised atomic st...